In Situ Host Data Review makes analyzing the data easy. Select the different signals from the list that you want charted, and click on "Make Chart". And, of course, all of the functionality of Excel is at your fingertips. Data can be reviewed by run (a single wafers data) or by reviewing Statistical Archives (250 wafers). Archives containing maximum, mean, and standard deviation are automatically maintained.

The widespread use of in situ metrology will be an inevitable result of the high value of each wafer and the increasing complexity of the semiconductor process. Testing process conditions every few hours leaves the factory in too much jeopardy.

In Situ Host is a system for integrating residual gas analysis instruments (R.G.A.), system state sensors, and semiconductor manufacturing equipment, providing a powerful fault detection tool.

With an In Situ Host system, it becomes feasible to provide highly capable, real-time process control and fault interdiction, even in complex environments.

RGA Data Review