Cluster Tool Monitor - the cluster tool monitor is used to identify the state of the slitvalves attached to the transfer chamber. With this information combined with information from the RGA, a determination as to the system health can be attained.

It is common to find a residual gas analyzer (RGA) installed on the transfer chamber of metal deposition cluster tools. From this location, any of the attached reactors can be inspected, most often, helium leak-checked.

Automating this inspection, such that tests are performed every time a slitvalve opens between the transfer chamber and the process reactor, can be a very valuable tool. Leak-checking is done by monitoring for atmospheric gases (N2 and/or O2). Other chemistry monitoring has also found value.

With a single RGA on the transfer chamber, we can monitor the entire cluster. In order to perform this function, the system must have the state (open or closed) of all of the slitvalves to the individual process reactors included in the algorithm.

The exchange chamber on a metal deposition tool is an example of in situ application that requires an intelligent host.